Specimen Handling, Preparation, and Treatments in Surface Characterization 53 Devices based on microstruc tures

Devices based on microstruc tures are useful vehicles for fundamental studies but also new device ideas require a thorough understanding of the basic physics

plus the European Economic Community

During the past decade

deren Wert wesentlich unterhalb der Ela­ stizitatsgrenze liegt

Specimen Handling, Preparation, and Treatments in Surface Characterization 53 Devices based on microstruc turesWith the development in the 1960s of ultrahigh vacuum equipment and techniques and electron, X ray, and ion beam techniques to determine the structure and composition of interfaces, activities in the field of surface science grew nearly exponentially. Today surface science impacts all major fields of study from physical to biological sciences, from physics to chemistry, and all engineering disciplines. The materials and phenomena characterized by